Specific Process Knowledge/Etch/Etching of Silicon: Difference between revisions
| Line 349: | Line 349: | ||
*Quartz/fused silica | *Quartz/fused silica | ||
| | | | ||
*Silicon | *Silicon | ||
*Silicon oxides | |||
*Silicon (oxy)nitrides | |||
*Metals from the +list | *Metals from the +list | ||
*Metals from the -list | *Metals from the -list | ||