Specific Process Knowledge/Etch/Etching of Silicon: Difference between revisions
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*Quartz/fused silica | *Quartz/fused silica | ||
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* | *Silicon, silicon oxides, silicon nitrides | ||
*Metals from the +list | |||
*Metals from the -list | |||
*Alloys from the above list | |||
*Stainless steel | |||
*Glass | |||
*III-V materials | |||
*Resists | |||
*Polymers | |||
*Capton tape | |||
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<br clear="all" /> | <br clear="all" /> | ||