Specific Process Knowledge/Etch/Etching of Silicon: Difference between revisions
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*1 150 mm wafers (only when the system is set up to 150mm) | *1 150 mm wafers (only when the system is set up to 150mm) | ||
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*As many small samples as can be fitted on a | *As many small samples as can be fitted on a 150mm wafer | ||
* | *5 50 mm wafer fitted on a 150mm wafer | ||
*1 100 mm wafer | *1 100 mm wafer on a 150mm wafer | ||
*1 150 mm wafers ( | *1 150 mm wafers (The system is normally set up to 150mm) | ||
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*As many samples as can be securely fitted on a up to 200mm wafer | *As many samples as can be securely fitted on a up to 200mm wafer | ||
*1 50 mm wafer | *1 50 mm wafer with special carrier | ||
*1 100 mm wafer | *1 100 mm wafer with special carrier | ||
*1 150 mm wafers | *1 150 mm wafers with special carrier | ||
*1 200 mm wafer | *1 200 mm wafer | ||
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