Specific Process Knowledge/Etch/Etching of Polymer: Difference between revisions
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*Oxygen plasma | *Oxygen plasma | ||
*Oxygen plasma mixed with N<sub>2</sub> | *Oxygen plasma mixed with | ||
**N<sub>2</sub> | |||
**CF<sub>4</sub> | **CF<sub>4</sub> | ||
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*Oxygen plasma | *Oxygen plasma | ||
*Oxygen plasma mixed with N<sub>2</sub> | *Oxygen plasma mixed with | ||
**N<sub>2</sub> | |||
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*Oxygen plasma | *Oxygen plasma | ||