Specific Process Knowledge/Etch/Etching of Polymer: Difference between revisions
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== Etching of Polymer == | == Etching of Polymer == | ||
Stripping of polymer is often done by wet chemistry in a solvent that dissolves the given polymer. If wet chemistry cannot be used or a more | Stripping of polymer is often done by wet chemistry in a solvent that dissolves the given polymer. If wet chemistry cannot be used or a more controlled etch of the polymer is needed a plasma system is used instead. Plasma ashers are designed for removing polymers in primarily oxygen plasmas. It you need a more directional etch with a masking material RIE2 or ASE can be used. | ||
*[[/Polymer Etch by ASE|Polymer Etch by ASE]] | *[[/Polymer Etch by ASE|Polymer Etch by ASE]] | ||