Specific Process Knowledge/Etch/Etching of Polymer: Difference between revisions
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*Si,SiO2,Si3N4 | *Si,SiO2,Si3N4 | ||
*Metals (no Pb or | *Metals (no Pb or Te) | ||
*Resists, polymers | *Resists, polymers | ||
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| Line 140: | Line 140: | ||
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*Si,SiO2,Si3N4 | *Si,SiO2,Si3N4 | ||
*Metals (no Pb or | *Metals (no Pb or Te) | ||
*Resists, polymers | *Resists, polymers | ||
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