Specific Process Knowledge/Etch/Etching of Polymer: Difference between revisions
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!'''Allowed materials''' | !'''Allowed materials''' | ||
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* | Silicon wafers with layers of | ||
* | *silicon oxide or silicon (oxy)nitride | ||
*Photoresist/e-beam resist | |||
*PolySilicon | |||
*Aluminium | |||
*Polymers (list?) | |||
Quartz/fused silica wafers | |||
Polymer wafers? | |||
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* | *Si,SiO2,Si3N4 | ||
* | *Metals (no Pb or Tl) | ||
* | *Resists, polymers | ||
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*Allowed material 1 | *Allowed material 1 | ||