Specific Process Knowledge/Etch/Wet Chromium Etch: Difference between revisions
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Wet etching of chromium at Danchip is done making your own set up in a beaker in a fume hood - preferably in cleanroom 2 or 4. You can see the APV [http://www.labmanager.danchip.dtu.dk/d4Show.php?id=2479&mach=146 here] We have two solution for this: | Wet etching of chromium at Danchip is done making your own set up in a beaker in a fume hood - preferably in cleanroom 2 or 4. You can see the APV [http://www.labmanager.danchip.dtu.dk/d4Show.php?id=2479&mach=146 here] We have two solution for this: | ||
# Commercial chromium etch (Chrome Etch 18). | # Commercial chromium etch (Chrome Etch 18). You can see the KBA [http://kemibrug.dk/KBA/CAS/107388/?show_KBA=1&portaldesign=1 here] | ||
# HNO<sub>3</sub>:H<sub>2</sub>O:cerisulphate - 90ml:1200ml:15g | # HNO<sub>3</sub>:H<sub>2</sub>O:cerisulphate - 90ml:1200ml:15g | ||
Etch rate are depending on the level of oxidation of the metal. | Etch rate are depending on the level of oxidation of the metal. | ||