Specific Process Knowledge/Etch/Etching of Platinum: Difference between revisions
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==Etching of | ==Etching of Platinum== | ||
Etching of | Etching of Platinum can be done either by wet etch or by sputtering with ions. | ||
*[[Specific Process Knowledge/Etch/Wet | *[[Specific Process Knowledge/Etch/Wet Platinum Etch|Etching of Platinum by wet etch]] | ||
*[[Specific_Process_Knowledge/Etch/IBE⁄IBSD Ionfab 300 | *[[Specific_Process_Knowledge/Etch/IBE⁄IBSD Ionfab 300|Sputtering of Pt]] | ||
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