Specific Process Knowledge/Etch/Etching of Gold: Difference between revisions
| Line 35: | Line 35: | ||
*~100nm/min | *~100nm/min | ||
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* | *fast etch, mainly used for complete removal of metals | ||
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*~55nm/min (acceptance test) | *~55nm/min (acceptance test) | ||
| Line 35: | Line 35: | ||
*~100nm/min | *~100nm/min | ||
| | | | ||
* | *fast etch, mainly used for complete removal of metals | ||
| | | | ||
*~55nm/min (acceptance test) | *~55nm/min (acceptance test) | ||