Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions
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| Line 57: | Line 57: | ||
|'''Resolution z''' | |'''Resolution z''' | ||
|1Å, 10Å or 20Å | |1Å, 10Å or 20Å | ||
| | |1Å, 10Å, 80Å or 160Å | ||
|Depending on measuring methode: | |Depending on measuring methode: | ||
*PSI down to 0.01 nm | *PSI down to 0.01 nm | ||