Specific Process Knowledge/Etch/Wet Chromium Etch: Difference between revisions
| Line 53: | Line 53: | ||
|- | |- | ||
|'''Etch rate''' | |'''Etch rate''' | ||
| | |~ ? nm/min | ||
|~40-100 nm/min | |~40-100 nm/min | ||
|- | |- | ||
|'''Batch size''' | |'''Batch size''' | ||
| Line 53: | Line 53: | ||
|- | |- | ||
|'''Etch rate''' | |'''Etch rate''' | ||
| | |~ ? nm/min | ||
|~40-100 nm/min | |~40-100 nm/min | ||
|- | |- | ||
|'''Batch size''' | |'''Batch size''' | ||