Specific Process Knowledge/Etch/Wet Chromium Etch: Difference between revisions
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|'''Batch size''' | |'''Batch size''' | ||
|1-7 wafers at a time | |1-7 wafers at a time | ||
|1-7 wafers at a time | |1-7 wafers at a time | ||
|- | |- | ||
|'''Size of substrate''' | |'''Size of substrate''' | ||
| | |4" wafers | ||
4" wafers | |4" wafers | ||
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|- | |- | ||
|'''Allowed materials''' | |'''Allowed materials''' | ||
| | |No restrictions. Make a note on the beaker of which materials have been processed. | ||
No restrictions. | |No restrictions. Make a note on the beaker of which materials have been processed. | ||
Make a note on the | |||
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|- | |- | ||
|} | |} | ||