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Specific Process Knowledge/Etch/Wet Aluminium Etch: Difference between revisions

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===Comparing the two solutions===
===Comparing the two solutions===
{| border="2" cellspacing="0" cellpadding="4"  
{|border="1" cellspacing="1" cellpadding="3" style="text-align:left;"
|-
 
|-
|-style="background:silver; color:black"
!  
!  
! Aluminium Etch 1
! Aluminium Etch 1
! Aluminium Etch 2
! Aluminium Etch 2
|-  
|-  
 
|-style="background:WhiteSmoke; color:black"
|'''General description'''
!General description
|Etch of pure aluminium
|Etch of pure aluminium
|Etch of aluminium + 1.5% Si
|Etch of aluminium + 1.5% Si
|-
|-
 
|-style="background:LightGrey; color:black"
|'''Chemical solution'''
!Link to safety APV and KBA
|[http://www.labmanager.danchip.dtu.dk/d4Show.php?id=1892&mach=130 see APV here]
[http://kemibrug.dk/KBA/CAS/108568/?show_KBA=1&portaldesign=1 see KBA here]
|[http://www.labmanager.danchip.dtu.dk/d4Show.php?id=1892&mach=130 see APV here]
[http://kemibrug.dk/KBA/CAS/108568/?show_KBA=1&portaldesign=1 see KBA here]
|-
|-style="background:WhiteSmoke; color:black"
!Chemical solution
|H<sub>2</sub>O:H<sub>3</sub>PO<sub>4</sub>  1:2
|H<sub>2</sub>O:H<sub>3</sub>PO<sub>4</sub>  1:2
|PES 77-19-04  
|PES 77-19-04  
|-
|-
 
|-style="background:LightGrey; color:black"
|'''Process temperature'''
|'''Process temperature'''
|50 <sup>o</sup>C
|50 <sup>o</sup>C
|20 <sup>o</sup>C
|20 <sup>o</sup>C
|-
|-
 
|-style="background:WhiteSmoke; color:black"
|'''Possible masking materials'''
|'''Possible masking materials'''
|Photoresist (1.5 µm AZ5214E)
|Photoresist (1.5 µm AZ5214E)
|Photoresist (1.5 µm AZ5214E)
|Photoresist (1.5 µm AZ5214E)
|-
|-
 
|-style="background:LightGrey; color:black"
|'''Etch rate'''
|'''Etch rate'''
|~100 nm/min (Pure Al)
|~100 nm/min (Pure Al)
|~60 nm/min
|~60 nm/min
|-
|-
 
|-style="background:WhiteSmoke; color:black"
|'''Batch size'''
|'''Batch size'''
|1-25 wafers at a time
|1-25 wafers at a time
|1-25 wafer at a time
|1-25 wafer at a time
|-
|-
 
|-style="background:LightGrey; color:black"
|'''Size of substrate'''
|'''Size of substrate'''
|4" wafers
|4" wafers
|4" wafers
|4" wafers
|-
|-
 
|-style="background:WhiteSmoke; color:black"
|'''Allowed materials'''
|'''Allowed materials'''
|
|
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