Specific Process Knowledge/Etch/KOH Etch: Difference between revisions
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:Etch of Si(100) with boron etch-stop | :Etch of Si(100) with boron etch-stop | ||
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|'''Link to safety APV''' | |||
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:[http://www.labmanager.danchip.dtu.dk/d4Show.php?id=1906&mach=248 see APV here] | |||
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:[http://www.labmanager.danchip.dtu.dk/d4Show.php?id=1906&mach=49 see APV here] | |||
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|'''Chemical solution''' | |'''Chemical solution''' | ||