Specific Process Knowledge/Etch/Etching of Titanium: Difference between revisions
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!Generel description | !Generel description | ||
|BHF:Etch of titanium with or without photoresist mask. | |BHF:Etch of titanium with or without photoresist mask. | ||
|Etch of titanium (as stripper or with eagle resist). | |Cold RCA1: Etch of titanium (as stripper or with eagle resist). | ||
|Dry plasma etch of Ti | |Dry plasma etch of Ti | ||
|Sputtering of Ti - pure physical etch | |Sputtering of Ti - pure physical etch | ||