Jump to content

Specific Process Knowledge/Etch/Etching of Chromium: Difference between revisions

BGE (talk | contribs)
BGE (talk | contribs)
Line 66: Line 66:
!Substrate size
!Substrate size
|
|
*<nowiki>#</nowiki>1-25 100 mm wafers
*Any size and number that can go inside the beaker in use
|
|
*<nowiki>#</nowiki>1-25 100 mm wafers
*Any size and number that can go inside the beaker in use
|
|
*smaller pieces on a carrier wafer
*smaller pieces on a carrier wafer