Specific Process Knowledge/Etch/Etching of Chromium: Difference between revisions
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!Etch rate range | !Etch rate range | ||
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*~100nm/min | *~40-100nm/min | ||
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*~ | *~?nm/min | ||
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*~350 nm/min (depending on features size and etch load) | *~350 nm/min (depending on features size and etch load) | ||