Specific Process Knowledge/Etch/Etching of Aluminium: Difference between revisions
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*Photoresist | *Photoresist | ||
*E-beam resist | *E-beam resist | ||
| | |||
*Silicon | |||
*Quartz/fused silica | |||
*Photoresist/e-beam resist | |||
*PolySilicon, | |||
*Silicon oxide | |||
*Silicon (oxy)nitride | |||
*Aluminium | |||
*Titanium | |||
*Chromium | |||
|- | |- | ||
|} | |} | ||