Specific Process Knowledge/Etch/Etching of Aluminium: Difference between revisions

@@ Line 84: / Line 84: @@
 !'''Allowed materials'''
 |
-*Allowed material 1
+*Aluminium
-*Allowed material 2
+*Silicon
+*Silicon Oxide
+*Silicon Nitride
+*Silicon Oxynitride
+*Photoresist
+*E-beam resist
 |
-*Allowed material 1
+*Aluminium
-*Allowed material 2
+*Silicon
-*Allowed material 3
+*Silicon Oxide
+*Silicon Nitride
+*Silicon Oxynitride
+*Photoresist
+*E-beam resist
 |-
 |}