Specific Process Knowledge/Etch/Etching of Aluminium: Difference between revisions

@@ Line 65: / Line 65: @@
 !Substrate size
 |
-*<nowiki>#</nowiki> small samples
+*<nowiki>#</nowiki>1-25 100 mm wafers
-*<nowiki>#</nowiki> 50 mm wafers
-*<nowiki>#</nowiki> 100 mm wafers
-*<nowiki>#</nowiki> 150 mm wafers
 |
-*<nowiki>#</nowiki> small samples
+*<nowiki>#</nowiki>1-25 100 mm wafers
-*<nowiki>#</nowiki> 50 mm wafers
+|
-*<nowiki>#</nowiki> 100 mm wafers
+*smaller pieces on a carrier wafer
-*<nowiki>#</nowiki> 150 mm wafers
+*<nowiki>#</nowiki>1 100mm wafers (when set up to 100mm wafers)
+*<nowiki>#</nowiki>1 150mm wafers (when set up to 150mm wafers)
+|
+Smaller pieces glued to carrier wafer
+*<nowiki>#</nowiki>1 50mm wafer
+*<nowiki>#</nowiki>1 100mm wafer
+*<nowiki>#</nowiki>1 150mm wafer
+*<nowiki>#</nowiki>1 200mm wafer
 |-