Specific Process Knowledge/Etch/Wet Silicon Oxide Etch (BHF): Difference between revisions
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Blue film also has a limited life time in BHF. Blue film is mainly used for back side protecting the wafer while etching on the front side. The life time of Blue film is also about ½ hour. | Blue film also has a limited life time in BHF. Blue film is mainly used for back side protecting the wafer while etching on the front side. The life time of Blue film is also about ½ hour. | ||
==Etch rate of the Stoichiometric Silicon Nitride in BHF== | |||
The etch rate of Si3N4 in BHF has been measured to be 0,75 nm/min (by Morten Bo Mikkelsen, March 2013. | |||