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Specific Process Knowledge/Etch/Etching of Aluminium: Difference between revisions

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|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!Generel description
!Generel description
|Generel description - methode 1
|Wet etch of pure Al
|Generel description - methode 2
|Wet etch of Al + 1.5% Si
|Dry plasma etch of Al
|Sputtering of Al - pure physical etch
|-
|-


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