Specific Process Knowledge/Etch/Etching of Aluminium: Difference between revisions
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Etching of aluminium can be done either by wet etch, dry etch or by sputtering with ions. | Etching of aluminium can be done either by wet etch, dry etch or by sputtering with ions. | ||
*[[/ | *[[Specific Process Knowledge/Etch/Wet Aluminium Etch|Etching of Al by wet etch]] | ||
*[[/Deposition of silicon nitride using LPCVD|Etching of Al by dry etch]] | *[[/Deposition of silicon nitride using LPCVD|Etching of Al by dry etch]] | ||
*[[/Deposition of silicon nitride using LPCVD|Etching of Al by sputering]] | *[[/Deposition of silicon nitride using LPCVD|Etching of Al by sputering]] | ||