Specific Process Knowledge/Imprinting: Difference between revisions

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Revision as of 12:12, 12 October 2007

Choose an equipment

  • MVD - Molecular Vapor Deposition - Antistiction coater for silicon stamps
  • Drop Shape Analyzer - Tool to measure the hydrophobicity of the antistiction layer
  • Speedline Manual Spinner - For spinning of PMMA and Topas
  • EVG NIL - Aligner and imprinting tool
  • Thyra - Home build imprinting tool
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