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Specific Process Knowledge/Thin film deposition/Deposition of Titanium: Difference between revisions

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|-style="background:WhiteSmoke; color:black"
!Allowed materials
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* Silicon oxide
* Silicon (oxy)nitride
* Photoresist
* PMMA
* Mylar
* SU-8
* Metals
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* Silicon oxide
* Silicon (oxy)nitride
* Photoresist
* PMMA
* Mylar
* SU-8
* Metals
|
* Silicon oxide
* Silicon (oxy)nitride
* Photoresist
* PMMA
* Mylar
* SU-8
* Metals
|
* Silicon oxide
* Silicon (oxy)nitride
* Photoresist
* PMMA
* Mylar
* SU-8
* Metals
|-style="background:LightGrey; color:black"
! Comment
! Comment
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== Comments: Choise of equipment ==
== Comments: Choise of equipment ==
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