Specific Process Knowledge/Etch/DRIE-Pegasus/processA: Difference between revisions
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== Process A guidelines == | |||
The section below describes an experiment where the performance of Process A is explored as a function of trench width and local/global etch load. | |||
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The perfomance of Process A has been investigated as a function of feature size and etch load. | The perfomance of Process A has been investigated as a function of feature size and etch load. | ||
=== Experiment === | === Experiment === | ||