Specific Process Knowledge/Thin film deposition/Deposition of Molybdenum: Difference between revisions
No edit summary |
No edit summary |
||
| Line 41: | Line 41: | ||
| About 1 Å/s | | About 1 Å/s | ||
|- | |- | ||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
! Comment | |||
| | |||
|Only very thin layers (up to 100nm). | |||
|- | |||
|} | |} | ||