Specific Process Knowledge/Thin film deposition/Deposition of Chromium: Difference between revisions
Appearance
No edit summary |
No edit summary |
||
| Line 53: | Line 53: | ||
|Depending on process parameters, see [[Sputtering of Cr in Wordentec|here.]] | |Depending on process parameters, see [[Sputtering of Cr in Wordentec|here.]] | ||
|- | |- | ||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
! Comment | |||
| | |||
| | |||
|Only very thin layers (up to 100nm). | |||
| | |||
|- | |||
|} | |} | ||