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Specific Process Knowledge/Thin film deposition/Deposition of Gold: Difference between revisions

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{| border="1" cellspacing="0" cellpadding="4"  
{| border="1" cellspacing="0" cellpadding="6"  
!  
!  
! E-beam evaporation ([[Specific Process Knowledge/Thin film deposition/Alcatel|Alcatel]])
! E-beam evaporation ([[Specific Process Knowledge/Thin film deposition/Alcatel|Alcatel]])
! E-beam evaporation ([[Specific Process Knowledge/Thin film deposition/Wordentec|Wordentec]])
! E-beam evaporation ([[Specific Process Knowledge/Thin film deposition/Wordentec|Wordentec]])
! Sputter (Lesker)
! Sputter (Lesker)
! Sputter coater Hummer
! Sputter coater Balzer
|-  
|-  
| Batch size
| Batch size
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