Specific Process Knowledge/Thermal Process/Furnace APOX: Difference between revisions
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'''Feedback to this page''': '''[mailto:thinfilm@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/Furnace_APOX click here]''' | |||
==Apox furnace (D1)== | ==Apox furnace (D1)== | ||
[[Image:APOX.JPG|thumb|300x300px|D1 Furnace Apox: positioned in cleanroom ?]] | [[Image:APOX.JPG|thumb|300x300px|D1 Furnace Apox: positioned in cleanroom ?]] | ||