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Specific Process Knowledge/Etch/Wet Silicon Oxide Etch (BHF): Difference between revisions

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===Silicon oxide etch data===
===Silicon oxide etch data===
{| border="2" cellspacing="0" cellpadding="5" align="left" width="900"
{| border="2" cellspacing="0" align="left" cellpadding="5"  
!  
!  
! BHF
! BHF
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