Specific Process Knowledge/Etch/Wet Silicon Oxide Etch (BHF): Difference between revisions
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===Silicon oxide etch data=== | ===Silicon oxide etch data=== | ||
{| border="2" cellspacing="0" cellpadding="5" align="left" width="900 | {| border="2" cellspacing="0" cellpadding="5" align="left" width="900" | ||
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! BHF | ! BHF | ||
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|'''General description''' | |'''General description''' | ||
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Etching of silicon oxide with a stable etch rate | Etching of silicon oxide with a stable etch rate | ||
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