Specific Process Knowledge/Etch/DRIE-Pegasus/TrenchCharacterisation: Difference between revisions

Revision as of 21:04, 4 February 2013


	In the image the following parameters are shown: Top Width (TW) Depth (D) Bottom Width (BW) Mid Width (MW) To speed up the characterisation post-SEM the parameter 'Pixel Size' (PS) is added to the SEM databar (the blue circle).
	Depth	D*PS
	Bowing	$2{\frac {MW-{\frac {TW+BW}{2}}}{(TW+BW)}}$
	Sidewall angle	$acos({\frac {TW-BW}{2{\sqrt {D^{2}+{\frac {1}{4}}}}(TW^{2}-BW^{2})}})$
	$\sum _{n=0}^{\infty }{\frac {x^{n}}{n!}}$

@@ Line 19: / Line 19: @@
 |-
 ! Sidewall angle
-| <math>acos(\frac{TW-BW}{2\sqrt{D^2+}})  </math>
+| <math>acos(\frac{TW-BW}{2\sqrt{D^2+\frac{1}{4}}(TW^2-BW^2)})  </math>
 |-
 | <math>\sum_{n=0}^\infty \frac{x^n}{n!}</math>
 |-
 |}