Specific Process Knowledge/Etch/DRIE-Pegasus/TrenchCharacterisation: Difference between revisions
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! rowspan="6" align="center" | [[Image:Trench-defs-1.jpg|512px x 384px|Solid shade]] | ! rowspan="6" align="center" | [[Image:Trench-defs-1.jpg|512px x 384px|Solid shade]] | ||
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Revision as of 20:47, 4 February 2013
Parameters
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In the image the following parameters are shown:
To speed up the characterisation post-SEM the parameter 'Pixel Size' (PS) is added to the SEM databar. |
| Depth |
| Failed to parse (SVG (MathML can be enabled via browser plugin): Invalid response ("Math extension cannot connect to Restbase.") from server "https://wikimedia.org/api/rest_v1/":): {\displaystyle \sum_{n=0}^\infty \frac{x^n}{n!}} |