Specific Process Knowledge/Etch/DRIE-Pegasus/TrenchCharacterisation: Difference between revisions
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! rowspan="6" align="center" | [[Image:Trench-defs-1.jpg|512px x 384px|Solid shade]] | ! rowspan="6" align="center" | [[Image:Trench-defs-1.jpg|512px x 384px|Solid shade]] | ||
|- | |- | ||
! In the image the following parameters are shown: | ! width="200px"| In the image the following parameters are shown: | ||
* Top Width (TW) | * Top Width (TW) | ||
* Depth (D) | * Depth (D) | ||
Revision as of 20:47, 4 February 2013
Parameters
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In the image the following parameters are shown:
To speed up the characterisation post-SEM the parameter 'Pixel Size' (PS) is added to the SEM databar. |
| Depth |
