Specific Process Knowledge/Etch/DRIE-Pegasus/TrenchCharacterisation: Difference between revisions
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{| border="2" cellspacing="0" cellpadding="0" align="center" | {| border="2" cellspacing="0" cellpadding="0" align="center" | ||
! rowspan="5" align="center" width=" | ! rowspan="5" align="center" width="300px" | [[Image:Trench-defs-1.jpg]] | ||
|- | |||
! Top Width (TW) | ! Top Width (TW) | ||
|- | |||
! Depth (D) | ! Depth (D) | ||
|- | |||
! Bottom Width (BW) | ! Bottom Width (BW) | ||
|- | |||
! Mid Width (MW) | ! Mid Width (MW) | ||
|- | |||
! Pixel Size (PS) | ! Pixel Size (PS) | ||
|- | |- | ||
|} | |} | ||
Revision as of 20:21, 4 February 2013
Parameters
|
|---|
| Top Width (TW) |
| Depth (D) |
| Bottom Width (BW) |
| Mid Width (MW) |
| Pixel Size (PS) |