Specific Process Knowledge/Lithography: Difference between revisions
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| Line 115: | Line 115: | ||
!Substrate size | !Substrate size | ||
| | | | ||
* small samples | *small samples | ||
* 50 mm wafers | *50 mm wafers | ||
* 100 mm wafers | *100 mm wafers | ||
* 150 mm wafers | *150 mm wafers | ||
| | | | ||
* | *small samples | ||
* | *50 mm wafers | ||
* | *100 mm wafers | ||
* | *150 mm wafers | ||
| | | | ||
We have cassettes that fit to | We have cassettes that fit to | ||
| Line 132: | Line 132: | ||
Only one cassette can be loaded at time | Only one cassette can be loaded at time | ||
| | | | ||
* | *small samples | ||
* | *50 mm wafers | ||
* | *100 mm wafers | ||
* | *150 mm wafers | ||
| | | | ||
* | *Cover slides | ||
* | *50 mm wafers | ||
* | *100 mm wafers | ||
* | *IBIDI | ||
|- | |- | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||