Specific Process Knowledge/Lithography: Difference between revisions

@@ Line 115: / Line 115: @@
 !Substrate size
 |
-*<nowiki>#</nowiki> small samples
+* small samples
-*<nowiki>#</nowiki> 50 mm wafers
+* 50 mm wafers
-*<nowiki>#</nowiki> 100 mm wafers
+* 100 mm wafers
-*<nowiki>#</nowiki> 150 mm wafers
+* 150 mm wafers
 |
 *<nowiki>#</nowiki> small samples