Specific Process Knowledge/Lithography: Difference between revisions

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 We have cassettes that fit to
-*<nowiki>#</nowiki> 4 small samples (20mm, 12mm, 8mm, 4mm)
+*4 small samples (20mm, 12mm, 8mm, 4mm)
-*<nowiki>#</nowiki> 6 wafers of 50 mm in size
+*6 wafers of 50 mm in size
-*<nowiki>#</nowiki> 2 wafers of 100 mm in size
+*2 wafers of 100 mm in size
-*<nowiki>#</nowiki> 1 wafer of 150 mm in size
+*1 wafer of 150 mm in size
+Only one cassette can be loaded at time
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 *<nowiki>#</nowiki> small samples