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Specific Process Knowledge/Characterization/Sample imaging: Difference between revisions

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(Dektak 8, Dektak XTA)
(Dektak 8, Dektak XTA)
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!Vertical resolution
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|-style="background:WhiteSmoke; color:black"
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!Horizontal resolution
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!Resolution limited by
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|Wavelenght of light
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|Interaction volume
|Tip shape
|Stylus shape
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!Field of view
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!Probe
|Light
|Light
|Electrons
|Forces
|Contacts
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