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Specific Process Knowledge/Lithography: Difference between revisions

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Bureaucrats, danchip, Administrators
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2,908 edits
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|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!Parameter 2
!Resist type
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*A
*UV sensitive:
*B
**AZ
*C
**SU8
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*A
*DUV sensitive
**fff
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*3
*E-beam sensitive
**ZEP502A
**SU8
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*4
*Imprint polymers:
**??
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*5
*?? sensitive:
**??
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