Specific Process Knowledge/Etch/DRIE-Pegasus/Parameters: Difference between revisions
Appearance
No edit summary |
No edit summary |
||
| Line 1: | Line 1: | ||
<!-- revised 1/6-2015 by jmli --> | |||
Short description of some process parameters on the DRIE-Pegasus | Short description of some process parameters on the DRIE-Pegasus | ||