Specific Process Knowledge/Lithography: Difference between revisions
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! | ! | ||
![[Specific Process Knowledge/Thin film deposition/Furnace LPCVD Nitride| | ![[Specific Process Knowledge/Thin film deposition/Furnace LPCVD Nitride|Photolithography]] | ||
![[Specific Process Knowledge/Thin film deposition/PECVD| | ![[Specific Process Knowledge/Thin film deposition/PECVD|DUV Lithography]] | ||
![[Specific Process Knowledge/Thin film deposition/PECVD|E-beam Lithography]] | |||
![[Specific Process Knowledge/Thin film deposition/PECVD|Imprint Lithograph]] | |||
![[Specific Process Knowledge/Thin film deposition/PECVD|Two photon Lithography]] | |||
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|Generel description - methode 1 | |Generel description - methode 1 | ||
|Generel description - methode 2 | |Generel description - methode 2 | ||
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|5 | |||
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|-style="background:LightGrey; color:black" | |-style="background:LightGrey; color:black" | ||
!Parameter 1 | !Parameter 1 | ||
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*A | |||
*B | |||
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*A | |||
*B | |||
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*A | |||
*B | |||
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*A | *A | ||
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*A | *A | ||
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*3 | |||
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*4 | |||
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*5 | |||
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*<nowiki>#</nowiki> 100 mm wafers | *<nowiki>#</nowiki> 100 mm wafers | ||
*<nowiki>#</nowiki> 150 mm wafers | *<nowiki>#</nowiki> 150 mm wafers | ||
| | | | ||
*<nowiki>#</nowiki> small samples | |||
*<nowiki>#</nowiki> 50 mm wafers | |||
*<nowiki>#</nowiki> 100 mm wafers | |||
*<nowiki>#</nowiki> 150 mm wafers | |||
| | |||
*<nowiki>#</nowiki> small samples | |||
*<nowiki>#</nowiki> 50 mm wafers | |||
*<nowiki>#</nowiki> 100 mm wafers | |||
*<nowiki>#</nowiki> 150 mm wafers | |||
| | |||
*<nowiki>#</nowiki> small samples | |||
*<nowiki>#</nowiki> 50 mm wafers | |||
*<nowiki>#</nowiki> 100 mm wafers | |||
*<nowiki>#</nowiki> 150 mm wafers | |||
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|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
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*Allowed material 1 | *Allowed material 1 | ||
*Allowed material 2 | *Allowed material 2 | ||
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*Allowed material 1 | |||
*Allowed material 2 | |||
*Allowed material 3 | |||
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*Allowed material 1 | |||
*Allowed material 2 | |||
*Allowed material 3 | |||
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*Allowed material 1 | |||
*Allowed material 2 | |||
*Allowed material 3 | |||
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*Allowed material 1 | *Allowed material 1 | ||