Specific Process Knowledge/Etch/DRIE-Pegasus/processB: Difference between revisions
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A number of wafers are patterned with the [[Specific Process Knowledge/Photolithography/masks/travka|travka masks]] in 4 microns of AZ photoresist. The wafers are then etc | A number of wafers are patterned with the [[Specific Process Knowledge/Photolithography/masks/travka|travka masks]] in 4 microns of AZ photoresist. The wafers are then etc | ||
{| | |||
{| | |||
| STYLE="vertical-align: top"| | |||
{| border = 1 | |||
|+ '''Wafers''' | |||
|- | |- | ||
! Wafer number | ! width="50" |Wafer number | ||
! Mask | ! width="50" |Mask | ||
! Process B duration | ! width="50" |Process B duration | ||
|- | |- | ||
| 2 | | 2 | ||
| Line 124: | Line 128: | ||
| Travka 20 | | Travka 20 | ||
| 34 cycles or 6:14 mins | | 34 cycles or 6:14 mins | ||
|} | |||
|+ '''Wafers''' | |||
|- | |||
! width="50" |Wafer number | |||
! width="50" |Mask | |||
! width="50" |Process B duration | |||
|- | |- | ||
| 11 | | 11 | ||
| Line 148: | Line 158: | ||
| Travka 65 | | Travka 65 | ||
| 34 cycles or 6:14 mins | | 34 cycles or 6:14 mins | ||
|} | |||
| STYLE="vertical-align: top"| | |||
{| border = 1 | |||
{| | |||
| STYLE="vertical-align: top"| | |||
{| border = 1 | |||
|+ '''Travka 05: A-line 2 µm to 25 µm fields''' | |||
! width="50" |Trench width (µm) | |||
! width="50" |Ridge width (µm) | |||
! width="50" |Period width (µm) | |||
! width="50" |Total periods | |||
! width="50" |Width of array (µm) | |||
|- | |||
|2||38||40||2||80 | |||
|- | |||
|3||57||60||3||180 | |||
|- | |||
|4||76||80||2||160 | |||
|- | |||
|6||114||120||1||120 | |||
|- | |||
|8||152||160||1||160 | |||
|- | |||
|10||190||200||1||200 | |||
|- | |||
|15||285||300||1||300 | |||
|- | |||
|25||475||500||1||500 | |||
|} | |||
| STYLE="vertical-align: top"| | |||
{| border = 1 | |||
|+ '''Travka 05: A-line 40 µm to 300 µm fields''' | |||
|- | |||
! width="50" |Trench width (µm) | |||
! width="50" |Ridge width (µm) | |||
! width="50" |Period width (µm) | |||
! width="50" |Total periods | |||
! width="50" |Width of array (µm) | |||
|- | |||
|40||760||800||1||800 | |||
|- | |||
|50||950||1000||1||1000 | |||
|- | |||
|75||1425||1500||1||1500 | |||
|- | |||
|100||1900||2000||1||2000 | |||
|- | |||
|150||2850||3000||1||3000 | |||
|- | |||
|200||3800||4000||1||4000 | |||
|- | |||
|300||5700||6000||1||6000 | |||
|} | |||
|} | |} | ||