Specific Process Knowledge/Etch/DRIE-Pegasus/processB: Difference between revisions
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! Process B duration | ! Process B duration | ||
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| 17 cycles or 3:07 mins | | 17 cycles or 3:07 mins | ||
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| 34 cycles or 6:14 mins | | 34 cycles or 6:14 mins | ||
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| 34 cycles or 6:14 mins | | 34 cycles or 6:14 mins | ||