Specific Process Knowledge/Etch/ASE (Advanced Silicon Etch): Difference between revisions
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| Line 13: | Line 13: | ||
| 10<sup>o</sup>C | | 10<sup>o</sup>C | ||
! SF<sub>6</sub> Flow | ! SF<sub>6</sub> Flow | ||
| | | 260 sccm | ||
| 0 sccm | | 0 sccm | ||
|- | |- | ||
| Line 19: | Line 19: | ||
| 31 | | 31 | ||
! O<sub>2</sub> Flow | ! O<sub>2</sub> Flow | ||
| | | 26 sccm | ||
| 0 sccm | | 0 sccm | ||
|- | |- | ||
| Line 40: | Line 40: | ||
| 0 W | | 0 W | ||
|- | |- | ||
! | |||
| | |||
! Cycle time | |||
| 6.5 s | |||
| 5 s | |||
|} | |} | ||