Specific Process Knowledge/Etch/ASE (Advanced Silicon Etch): Difference between revisions
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{| border="1" cellpadding="5" cellspacing=" | {| border="1" cellpadding="5" cellspacing="1" | ||
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! colspan="2" align="center"| Common parameters | ! colspan="2" align="center"| Common parameters | ||
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| Pass | | Pass | ||
|- | |- | ||
| C | | Temperature | ||
| | | 10<sup>0</sup>C | ||
| SF<sub>6</sub> Flow | |||
| 230 sccm | |||
| 0 sccm | |||
|- | |- | ||
| E | | E | ||