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Specific Process Knowledge/Etch/ASE (Advanced Silicon Etch): Difference between revisions

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{| border="1" cellpadding="5" cellspacing="10"
{| border="1" cellpadding="5" cellspacing="10"
|-
|-
! colspan="2" align="center"| Common parameters|
! colspan="2" align="center"| Common parameters
!colspan="3" align="center"| Multiplexed parameters |
! colspan="3" align="center"| Multiplexed parameters  
|-
|-
|
| Parameter 
| rowspan="2"| A
| Setting
| colspan="2" align="center"| B
| Parameter
| Etch
| Pass
|-
|-
| C <!-- column 1 occupied by cell A -->
| C  
| D  
| D  
|-
|-
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