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Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions

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* 20 nm (limited by instrument)
* 20 nm (limited by instrument)
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!style="background:silver; color:black" align="center" valign="center" rowspan="4"|Process parameter range
!style="background:silver; color:black" align="center" valign="center" rowspan="4"|Instrument specifications
|style="background:LightGrey; color:black"|Detectors
|style="background:LightGrey; color:black"|Detectors
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|style="background:LightGrey; color:black"|Operating pressures
|style="background:LightGrey; color:black"|Operating pressures
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* High vacuum (2 &times; 10<sup>-5</sup>mbar - 10<sup>-6</sup>mbar)
* Fixed at High vacuum (2 &times; 10<sup>-5</sup>mbar - 10<sup>-6</sup>mbar)
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* High vacuum (2 &times; 10<sup>-4</sup>mbar - 10<sup>-6</sup>mbar)
* Fixed at High vacuum (2 &times; 10<sup>-4</sup>mbar - 10<sup>-6</sup>mbar)
* Low vacuum (0.1 mbar-2 mbar)
* Variable at Low vacuum (0.1 mbar-2 mbar)
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* High vacuum (2 &times; 10<sup>-4</sup>mbar - 10<sup>-6</sup>mbar)
* Fixed at High vacuum (2 &times; 10<sup>-4</sup>mbar - 10<sup>-6</sup>mbar)
* Low vacuum (0.1 mbar-2 mbar)
* Variable at Low vacuum (0.1 mbar-2 mbar)
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* High vacuum
* Fixed at High vacuum
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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates
!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates
|style="background:LightGrey; color:black"|Sample sizes
|style="background:LightGrey; color:black"|Sample sizes
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* X, Y, Z, R and T
* Wafers up to 6" (only full view up to 4")
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* Up to 6" wafer with full view
* Up to 6" wafer with full view
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| style="background:LightGrey; color:black"|Allowed materials
| style="background:LightGrey; color:black"|Allowed materials
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* Leo 
* Any standard nanotechnology material except graphene or CNT samples
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* Zeiss
* Any standard nanotechnology material except graphene or CNT samples
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* FEI
* Any standard nanotechnology material including graphene or CNT samples
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* Jeol
* Any standard nanotechnology material including graphene or CNT samples
* Biological samples
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